| 1. |
scribing machine which is suitable for 2nd generation large diameter ultra thin wafer. |
| 2. |
Air controlled tool scribe
Unlike in a spring method, in an air suspension method a fixed load can
be set without being influenced by cutting depth it also reduces the risk
of jumping. |
| 3. |
Porous Chuck Table
By using a porous chuck when securing working surfaceto the table a uniformed
suction can be applied to make a clean scribe possible. |
| 4. |
Linear servo motor
The machine is equipped with a linear servo motor for more precise scribing
by minimizing vibration in the driving side. |
