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Applicable to a wide range of wafers from 2" to 6"
| 1. |
Air ride and linear servo used on work axis to achieve high-precision scribing. |
| 2. |
Easy to use, capable of mass production without problems. |
| 3. |
Compatible with wide range of applications from 2-inch to 6-inch. |
| 4. |
Utilizes porous chuck that enables uniform attachment to the entire work
surface, resulting in high-quality scribing. |
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